Improved Dual Electrothermal Microgripper based on a Chevron actuator | Chapter 03 | Advances in Applied Science and Technology Vol. 3
In
Micro-Electro-Mechanical
Systems (MEMS) technology,
there is an
important interest in the
characterization of devices using dynamic analysis, which is a technique to
determine the dynamic behavior of a structure or component, involving time,
inertia and the possibly damping of the structure. This paper
is focused on the analysis
and simulation of an improved
dual microgripper and
its components:
microcantilever and chevron.
In addition, a
movement amplifier based
on an arrangement of beams was
also designed in order to improve the
opening of each jaw of the top gripper. Dual microgrippers
are designed on silicon and implemented using Professional Autodesk Inventor.
Top gripper is initially closed, while the down one is initially open. The
analytical response of the
microgripper components was
acquired with Steady-State Thermal, Static Structural, and Modal modules of
Ansys Workbench Software. The
dynamic behavior, resonance
frequencies for chevron
actuator and dual
microgrippers are presented. Simulation
results show the
modal shapes of
allanalyzed devices, determining
their respective modal frequencies. A comparison between initial and
improved dual microgrippers was
also performed. About the top grippers,
the increment showed by the improved microgripper in total displacement is of
24.4%, and the temperature distribution only showed a little reduction (7%).
For the case of the down gripper, the total displacement decrease in
approximately 50%, force remains without change and its temperature shows a
little decrement (7.2%). In both dual microgrippers, the biggest temperature
value resides in the chevron inside, at the top part of its shuttle, with
162.76°C. Supply voltage was considered from 0 to 7 V. This swept could be
useful to determine the more
appropriate voltage level
to obtain adesirable
response. In each
analyzed device, their corresponding modal shapes, using FEA, were
determined. The modal shapes analysis allow to understand the performance of
the analyzed devices, at the correspondent frequency. From the comparison
between initial and improved dual microgrippers, implemented with Silicon,
special attention was given to the top grippers. Total displacement showed by
the improved microgripper has a
maximum value of
0.86 μm. Third
natural frequency remains
almost without change (4.7%), increasing at 70.38 kHz and
the temperature distribution only showed a little reduction (7%, maximum
temperature was of 131.49°C), which is
better for practical applications. For the case of the down grippers of
improved dual microgripper, the total displacement decrease in approximately
50% (with a value of 0.18 μm), force remains without change (3.8 μN) and its
temperature decreases (7.2%), at 162.77°C, which is also better for practical
applications. These parameters values of the improved dual microgripper are
illustrative for possible applications.
Author(s) Details
Margarita Tecpoyotl Torres
Centro de Investigación en
Ingeniería y Ciencias Aplicadas, IICBA-CIICAp-UAEM, Mexico.
Pedro Vargas Chablé
Doctorado en Ingeniería y
Ciencias Aplicadas, IICBA-CIICAp-UAEM, Mexico.
Alejandra Ocampo Diaz
Doctorado en Ingeniería y
Ciencias Aplicadas, IICBA-CIICAp-UAEM, Mexico.
Ramon Cabello Ruiz
Universidad Tecnológica
Emiliano Zapata del Estado de Morelos (UTEZ), Mexico.
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