Improved Dual Electrothermal Microgripper based on a Chevron actuator | Chapter 03 | Advances in Applied Science and Technology Vol. 3
In Micro-Electro-Mechanical Systems (MEMS) technology, there is an important interest in the characterization of devices using dynamic analysis, which is a technique to determine the dynamic behavior of a structure or component, involving time, inertia and the possibly damping of the structure. This paper is focused on the analysis and simulation of an improved dual microgripper and its components: microcantilever and chevron. In addition, a movement amplifier based on an arrangement of beams was also designed in order to improve the opening of each jaw of the top gripper. Dual microgrippers are designed on silicon and implemented using Professional Autodesk Inventor. Top gripper is initially closed, while the down one is initially open. The analyt...