Nanostructure Thin Films Prepared by Using PLD and SILAR Method | Chapter 11 | Advances in Applied Science and Technology Vol. 3
There are several types of binary,
ternary and quaternary thin films have been prepared using pulsed laser
deposition (PLD) and successive ion layer adsorption and reaction (SILAR)
method. These methods have many advantages such as able to control the
dimensions, the growth rate, film thickness and produce nano-particles. In this
work, PLD and SILAR methods were briefly discussed. Experimental results for
the films prepared using these two deposition techniques from literature review
will be described. Characterization of
thin films using various tools (SEM, EDAX, XRD, XPS, FTIR, UV-Visible
spectrophotometer, Raman Spectra) showed these deposition techniques were
suitable to prepare metal chalcogenide thin films.
Author(s) Details
Dr. Ho Soon Min
Assistant Professor, Centre
for Green Chemistry and Applied Chemistry, INTI International University, Putra
Nilai, 71800, Negeri Sembilan, Malaysia.
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